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THU800 Nanoimprint Machine
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THU800 Nanoimprint Machine

Product Details


It is a pressure-driven multifunctional nanoimprint machine, with hot embossing and UV embossing function, maximum support 6 inches imprint template. The addition of PDMS、SFP? & Hybrid Mold? soft template imprint technology can eliminate defects of imprinting results caused by dust at maximum extent, and support surfaces imprint . Currently LH-150 has been widely used in graphical sapphire substrate, solar cells, optical waveguide devices, biochips and other areas.


Technical specifications



Substrate size

Up to 8” circle, irregular shapes and sizes compatible

Imprint area

Same as substrate

Mold plate size

Up to 8” circle

Vacuum

-95kpa

Weight

300 Kg

Thermal imprint/embossing 

Imprint pressure

Up to8bar

Heating temperature

Up to 250

Heating mode

Electromagnetic induction

UV imprint (optional)

UV source

High pressure mercury lamp

UV lamp power

1000 Watt

Imprint pressure

Up to 6 bar

Installation requirements

Filtered pressure source

8bar

Power

110/220V, 50/60Hz , 4.0 KW or higher

Cleanroom class

1000 or better




Product appearance

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