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αL4X-911R1
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TOKKYOKIKI Active Vibration Isolation System αL4X-911R1

Product Details


The αL4X-911R1 active vibration isolation platform combines the advantages of air pressure (low frequency) and linear motor (high frequency). It is a high-precision vibration isolation platform designed for scanning electron microscopes. The fine vibration of the installation site that affects the normal operation of the instrument can be fully attenuated in all frequency ranges without degrading the performance of the instrument itself. The active vibration-removing device can fully attenuate the fine vibration of the installation site that affects the normal operation of the instrument and equipment in all frequency ranges without degrading the performance of the instrument itself.


Technical specifications


Dimensions 902 (W) × 1102 (D) × 152 (H) mm (Rest)

Weight 320kg

Control system 6 degrees of freedom feedback + feedforward control dual active control system

Load weight 1000kg

Input/output control signal:Sampling frequency Acceleration:2000Hz  Displacement: 125Hz

                 Input / Output Resolution Input: 18bit Output 16bit

Input channel Acceleration: 9ch Displacement: 6ch

Output channel 6ch

Power supply φ1 AC100-240V, 50/60Hz, 80W

I/O function Input 4ch, output 8ch



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